|
 
|
|
Matching Network Options:
|
Available on:
|
|
|
|
|
Pulse Detector (PD)
|
AT6, AT3, AT10, AT20, AT30
|
|
Enables
Automatic Tuning when Using a pulsed RF Source.
|
|
|
Low Pass Filter (LPF)
|
AT3,AT6,AT10,AT20,AT30
|
|
Prevents system
harmonics from being sent back to the RF generator.
|
|
|
3 Switched RF Outputs (3X)
|
AT3,AT6, MM3 Series and MM6Series
|
|
13.56 MHz 10A @ 4.5KV Peak
|
|
|
13.56 MHz 17A @ 8KV Peak
|
|
|
|
|
Custom
Configurations Available
|